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Von Andenne Electron Beam Gun / Elektronenstrahl-Kanone EH150V NL-Lomm

op aanvraag
excl btw.
Merk:
Von Andenne
Bouwjaar:
volgt
Type:
EH150V
Ref nr:
10/98
Productomschrijving:

Technical Data:

Maximum beam power 150 kW

Beam power control range

Power control by VARIOCATHODE (space charge limited mode) ≈ 20 % to 100 %

Power control by bombardment power (temperature limited mode) 0 % to ≈ 20 %

Max. acceleration voltage 35 kV

Average life time of cathodes at maximum beam power 100 h to 200 h

Magnetic lenses 2

Number of X/Y coils 1

Maximum deflection angle

1 kHz system (coil/amplifier) ± 40º

10 kHz system ± 25º

Minimum spot diameter (at distance of 1 m, maximum beam power

and maximum acceleration voltage)

At process pressure of 5*10-2 Pa ≈ 10 mm

Maximum process pressure ≈ 5 Pa ≈ 5 Pa ≈ 2 Pa ≈ 15 mm

Features:

Power control by means of a patented VARIOCATHODE

High degree of pressure decoupling

Internal valve to separate EB gun from process chamber

Quick and simple changing of cathode plug

Features:

Power control by means of a patented VARIOCATHODE

High degree of pressure decoupling

Internal valve to separate EB gun from process chamber

Quick and simple changing of cathode plug

Benefits:

Easy handling and maintenance

High reliability

High acceleration voltage up to 60 kV

Magnetically self-focusing beam

Spikweien 13, 5943 AC Lomm
The Netherlands
BTW: NL003300744B15
Marc Geerts B.V. - 2021 - All rights reserved